Erratum: “Investigation of etched silicon wafers for lobster-eye optics” [Rev. Sci. Instrum. 70, 1268 (1999)]
نویسندگان
چکیده
منابع مشابه
Fabrication Method for LOBSTER-Eye Optics in <110> Silicon
Soft x-ray optics can use narrow slots to direct x-rays into a desirable pattern on a focal plane. While square-pack, square-pore, slumped optics exist for this purpose, they are costly. Silicon (Si) is being examined as a possible low-cost replacement. A fabrication method was developed for narrow slots in <110> Si demonstrating the feasibility of stacked slot optics to replace micropores. Cur...
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In a recent article, Disseldorp et al. [Rev. Sci. Instrum. 81, 043702 (2010)] present a micromachined z-scanner for scanning probe microscopy (SPM). The scanner comprises a micromachined electrostatically actuated membrane anchored to its substrate with crab-leg flexures. This structure is used as a fast actuator specifically for atomic force microscope and scanning tunneling microscope. The au...
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Erratum: “Physical apparatus parameters and model for vibrating tube densimeters at pressures to 140 MPa and temperatures to 473 K” [Rev. Sci. Instrum. 85, 095111 (2014)] Eric F. May,1 Weparn J. Tay,2 Manuela Nania,2 Amos Aleji,2 Saif Al-Ghafri,2 and J. P. Martin Trusler2 1Centre for Energy, School of Mechanical and Chemical Engineering, The University of Western Australia, Crawley, WA 6009, Au...
متن کاملDie separation and rupture strength for deep reactive ion etched silicon wafers
The work herein analyzes the bending stress required to separate and rupture die from notched silicon wafers. Trenches are formed on the wafers using either a dicing or Bosch deep reactive ion etching (DRIE) process. Weibull distribution parameters are reported for all variations of the fracture experiments. Additionally, the relative defect rate associated with DRIE-based die separation are co...
متن کاملComment on "Generation of cold low divergent atomic beam of indium by laser ablation" [Rev. Sci. Instrum. 76, 113302 (2005)].
We present measurements of the velocity distribution of calcium atoms in an atomic beam generated using a dual-stage laser back-ablation apparatus. Distributions are measured using a velocity selective Doppler time-of-flight technique. They are Boltzmann-like with rms velocities corresponding to temperatures above the melting point for calcium. Contrary to a recent report in the literature, thi...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2011
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.3629145